High mechanical Q-factor measurements on silicon bulk samples
نویسندگان
چکیده
منابع مشابه
High-q Mechanical Silicon Oscillators in Optomechanical Sensor Applications
OF DOCTORAL DISSERTATION HELSINKI UNIVERSITY OF TECHNOLOGY P.O. BOX 1000, FI-02015 TKK http://www.tkk.fi Author Ossi Hahtela Name of the dissertation High-Q mechanical silicon oscillators in optomechanical sensor applications Manuscript submitted 1st June 2007 Manuscript revised 17th September 2007 Date of the defence 26th October 2007 Monograph Article dissertation (summary + original articles...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2008
ISSN: 1742-6596
DOI: 10.1088/1742-6596/122/1/012008